Citations refer to the original publication, not to a Scieee localized version.
Wenisch, R., Lungwitz, F., Hanf, D., Heller, R., Zscharschuch, J., Hübner, R., Borany, J. V., Abrasonis, G., Gemming, S., Escobar-Galindo, R., & Krause, M. (2018). Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. American Chemical Society. https://doi.org/10.1021/acs.analchem.8b00923
Wenisch, Robert, et al. Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. American Chemical Society, 2018. https://doi.org/10.1021/acs.analchem.8b00923.
Wenisch, Robert, Frank Lungwitz, Daniel Hanf, René Heller, Jens Zscharschuch, René Hübner, Johannes von Borany, et al. Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. American Chemical Society, 2018. https://doi.org/10.1021/acs.analchem.8b00923.
Wenisch, R. et al. (2018) Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures. American Chemical Society. Available at: https://doi.org/10.1021/acs.analchem.8b00923.
R. Wenisch et al., “Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures,” American Chemical Society, 2018, doi: 10.1021/acs.analchem.8b00923.
@misc{wenisch2018cluster,
author = {Wenisch, Robert and Lungwitz, Frank and Hanf, Daniel and Heller, René and Zscharschuch, Jens and Hübner, René and Borany, Johannes von and Abrasonis, Gintautas and Gemming, Sibylle and Escobar-Galindo, Ramón and Krause, Matthias},
title = {Cluster Tool for In Situ Processing and Comprehensive Characterization of Thin Films at High Temperatures},
year = {2018},
publisher = {American Chemical Society},
doi = {10.1021/acs.analchem.8b00923},
url = {https://doi.org/10.1021/acs.analchem.8b00923}
}
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