ALD/E Neuro-symbolic Query Benchmark: 33 Scientific Queries over Machine-Actionable ORKG Comparisons

ALD/E Machine-ac ionable Table Que y
Resul s Valida ion
This su ey aims o assess whe he machine-ac ionable e sions o e iew- able da a, published in
he Open Resea ch Knowledge G aph (ORKG), can p o ide meaning ul and use ul insigh s when
que ied compu a ionally.
T adi ional e iew ables in PDFs a e di�cul o sea ch, �l e , o upda e, which limi s hei eusabili y.
By con e ing hese ables in o a machine-ac ionable o m, we enable que ies ha can in eg a e new
�ndings, compa e condi ions ac oss s udies, and allow esea che s o e ie e insigh s ins an ly.
You expe e alua ion will help de e mine which que ies genuinely suppo ALD/ALE esea ch p ac ice
and which ones need e�nemen .
Es ima ed ime: 30 minu es o 1 hou
We kindly eques ha you se aside one unin e up ed hou o comple e he su ey.
You expe ise is essen ial o assessing whe he machine-ac ionable e iews should become s anda d
p ac ice in he ALD/E communi y.
The esponden 's email ( [email protected]) was eco ded on submission o his o m.
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
1 o 45 11/26/2025, 8:49 AM
Below is one example o a adi ional e iew able mapped o an ORKG compa ison.
Each ow in he PDF becomes a pape con ibu ion, and each column becomes a s uc u ed
p ope y ha can be que ied p og amma ically.
Randall Higuchi
less han 1 yea
be ween 1 o 5 yea s
be ween 5 o 10 yea s
mo e han 10 yea s
Que y E alua ion
This su ey asks you o e alua e a se ies o na u al-language que ies execu ed on machine-ac ionable
e sions o e iew ables modeled as ORKG compa isons.
Name *
No. o y s. o educa ional and wo king expe ience in Ma e ials Science *
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
2 o 45 11/26/2025, 8:49 AM
Fo each que y, please a e:
- Meaning ulness: Does he ques ion make scien i�c sense?
- Use ulness:Would ha ing his syn hesis ins an ly a ailable (and con inually upda ed wi h new da a)
sa e you ime compa ed o manually consul ing he o iginal PDF ables
In o al, you will e alua e 19 que ies o ALD and 14 que ies o ALE.
The ALD que ies span se en ables d awn om h ee pape s, and he ALE que ies span ele en ables
d awn om six pape s.
Mos ables ha e wo que ies, and in one ALD pape and one ALE pape you will also encoun e c oss-
able que ies designed o in eg a e da a ac oss mul iple ables.
Wha you will do in his su ey:
1. Click he p o ided ORKG compa ison link (machine-ac ionable able)
2. Click he SPARQL que y link
3. Run he que y by p essing he blue Run bu on
4. Re iew he esul s a he bo om o he sc een
5. P o ide you a ings
Please No e:
You do no need o unde s and SPARQL.
You e alua ion should ocus only on:
(1) he na u al-language ques ion, and
(2) he esul ing syn hesized ou pu
You may assume ha a u u e sys em au oma ically ansla es na u al-language que ies in o he
app op ia e g aph-que y language.
ALD Pape 1 — Sa u a ion p o ile based con o mali y analysis o ALD in LHAR channels
DOI: h ps://doi.o g/10.1039/D0CP03358H
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
3 o 45 11/26/2025, 8:49 AM
Table 2 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 2:
h ps://o kg.o g/compa isons/R1469158
The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 2.
Q.1 Run he ollowing que y h ps:// inyu l.com/lh - eac o
Na u al-language ques ion being e alua ed:
“Show all combina ions o eac o ypes and LHAR s uc u es
epo ed in he ORKG compa ison, and coun how many imes each
combina ion occu s ac oss he included s udies.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.1 is meaning ul. *
Q.1 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
4 o 45 11/26/2025, 8:49 AM
Q.2 Run he ollowing que y h ps:// inyu l.com/pilla hall3-c ma
Na u al-language ques ion being e alua ed:
“A 300 °C in Pilla Hall-3, wha we e he cTMA alues epo ed ac oss s udies”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Need mo e de ails o he eac o used and condi ions beyond jus empe a u e
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
Q.2 is meaning ul. *
Q.2 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
5 o 45 11/26/2025, 8:49 AM

ALD Pape 2 — A omic laye deposi ion on pa icula e ma e ials om 1988 h ough 2023: A
quan i a i e e iew o echnologies, ma e ials and applica ions
DOI:
h ps://doi.o g/10.48550/a Xi .2506.17725
Table 3 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 3:
h ps://o kg.o g/compa isons/R1469383

The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 3.
Q.3 Run he ollowing que y h ps:// inyu l.com/Phospho -SiO2-ALD
Na u al-language ques ion being e alua ed:
“Which phospho s we e coa ed wi h SiO₂ in he ORKG compa ison R1469383
ha ep esen s Table 3 o he e iew ‘A omic laye deposi ion on
pa icula e ma e ials om 1988 h ough 2023: A quan i a i e e iew o
echnologies, ma e ials and applica ions’?”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.3 is meaning ul. *
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
6 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.4 Run he ollowing que y h ps:// inyu l.com/Red-Eu2-ALD- hinlowT
Na u al-language ques ion being e alua ed:
“Among Eu²⁺-doped phospho s wi h ed emission in he ORKG compa ison
R1469383 (Table 3 o ‘A omic laye deposi ion on pa icula e ma e ials
om 1988 h ough 2023: A quan i a i e e iew o echnologies, ma e ials
and applica ions’), which ALD coa ings we e deposi ed a empe a u es
≤150 °C wi h op imal hickness ≤20 nm, and wha p ecu so schemes we e
used?”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.3 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
Q.4 is meaning ul. *
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
7 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Table 4 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 4:
h ps://o kg.o g/compa isons/R1469594
 
The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 4.
Q.5 Run he ollowing que y h ps:// inyu l.com/less- han-40
Na u al-language ques ion being e alua ed:
“
Which suppo ma e ials we e coa ed a ≤ 40 °C in he ORKG compa ison R1469594 (Table 4 o ‘A omic
laye deposi ion on pa icula e ma e ials om 1988 h ough 2023: A
quan i a i e e iew o echnologies, ma e ials and applica ions’), and which p ecu so pai s we e used,
along wi h he epo ed coa ing hickness?”
Q.4 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
8 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.6 Run he ollowing que y h ps:// inyu l.com/pha ma-ha d-que y
Na u al-language ques ion being e alua ed:
“Among low- empe a u e uns (< 70 °C) ha p oduced hin coa ings (< 20 nm) in he ORKG compa ison
R1469594 (Table 4 o ‘A omic
laye deposi ion on pa icula e ma e ials om 1988 h ough 2023: A
quan i a i e e iew o echnologies, ma e ials and applica ions’),
lis he suppo ma e ial, p ecu so pai , deposi ion empe a u e,
coa ing hickness, and—when alumina is implied by TMA-based
p ecu so s—classi y he Al₂O₃ g ow h-pe -cycle (GPC) as slow (< 0.4 nm), a e age (0.4–1.0 nm), o as
(> 1.0 nm).”
Q.5 is meaning ul. *
Q.5 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
9 o 45 11/26/2025, 8:49 AM
Q.11 Run he ollowing que y h ps:// inyu l.com/HiGLoT-que y
Na u al-language ques ion being e alua ed:
“
Lis all a e-ea h ALD/MLD hyb id �lms ha achie e high g ow h pe cycle (GPC ≥ 5 Å) a low
deposi ion empe a u e
(≤ 250 °C). Fo each en y, epo he ma e ial sys em, he me al
p ecu so amily (e.g. R( hd)₃, R(dpdmg)₃), he o ganic p ecu so , he
GPC, and he deposi ion empe a u e, and so he esul s by GPC.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.11 is meaning ul. *
Q.11 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
16 o 45 11/26/2025, 8:49 AM

Q.12 Run he ollowing que y h ps:// inyu l.com/aldmld-linke -gpc
Na u al-language ques ion being e alua ed:
“G oup a e-ea h ALD/MLD hyb id �lms by o ganic linke amily ( e eph hala e, py idinedica boxyla e,
naph halenedica boxyla e, py azine-based, o he ) and compu e he a e age g ow h pe cycle (GPC) o
each amily, conside ing only �lms deposi ed a empe a u es ≤ 250 °C.
Repo , o each linke amily, he a e age GPC and he numbe o �lms
con ibu ing o his a e age, and so he amilies by descending
a e age GPC.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
only one amily showed up in he ou pu ?
Q.12 is meaning ul. *
Q.12 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
17 o 45 11/26/2025, 8:49 AM
Table 5 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 5:
h ps://o kg.o g/compa isons/R1469991
The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 5.
Q.13 Run he ollowing que y h ps:// inyu l.com/mosled-high-eqe
Na u al-language ques ion being e alua ed:
“
Among E ³⁺ MOSLEDs in he compa ison, which hos ma ices achie ed high ex e nal quan um
e�ciency (EQE ≥ 10%) a he lowes h eshold ol age, and wha annealing empe a u es and li e imes
(emission li e ime τ and ope a ional de ice li e ime OLT) we e epo ed?
Re u n, o each quali ying hos ma ix, he EQE, h eshold ol age,
annealing empe a u e, τ, and OLT, and so he esul s by inc easing
h eshold ol age and, wi hin he same ol age, by dec easing EQE.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.13 is meaning ul. *
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
18 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.14 Run he ollowing que y h ps:// inyu l.com/mosled-pa e o-sco e
Na u al-language ques ion being e alua ed:
“Compu e an e�ciency-pe - ol me ic, de�ned as
ex e nal quan um e�ciency di ided by h eshold ol age (EQE/Vol), o
all E ³⁺ MOSLED en ies in he compa ison.
Re u n, o each hos ma ix, he EQE, h eshold ol age, he de i ed
EQE-pe -Vol alue, and (op ionally) he annealing empe a u e, emission
li e ime (τ), and ope a ional de ice li e ime (OLT).
Rank he hos ma ices by descending EQE-pe -Vol , b eaking ies by lowe h eshold ol age and hen
highe EQE, o highligh ma e ials ha deli e high emission e�ciency a low ope a ing ol age.”
Q.13 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
19 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.15 C oss- able: Tables 3 and 5. Run he ollowing que y h ps:// inyu l.com/ 3 5-lowT
Na u al-language ques ion being e alua ed:
“
Show he ALD ecipe alongside de ice pe o mance o E ³⁺-based MOSLED hos ma ices.
Join MOSLED pe o mance (Table 5) wi h ALD p ocess en ies (Table 3) and
epo hos , bes EQE, ALD ma e ial, me al p ecu so , co- eac an ,
p ecu so amily, GPC, and deposi ion empe a u e.
So by dec easing EQE.”
Q.14 is meaning ul. *
Q.14 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
20 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Co- ac an is no cap u ed p ope ly in he able
Q.16 C oss- able: Tables 2 and 5. Run he ollowing que y h ps:// inyu l.com/LumMOSLED-
que y
Na u al-language ques ion being e alua ed:
“Which luminescen ma e ials lis ed as doped sys ems in he ALD dopan o e iew (Table 2) also ha e
MOSLED pe o mance da a?”
Q.15 is meaning ul. *
Q.15 esul p o ides a use ul syn hesis o he insigh s in he Tables.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he ables.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
21 o 45 11/26/2025, 8:49 AM

S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
The able o ma is oo long wi hou - o ganizing i a li le mo e o be easie o ead will help he use
ins ead o a gian lis
Q.17 C oss- able: Tables 3 and 5. Run he ollowing que y h ps:// inyu l.com/ 3 5-complex
Na u al-language ques ion being e alua ed:
“Fo each luminescen MOSLED hos ma e ial in Table 5, e ie e he ALD p ocess pa ame e s om
Table 3 and epo alongside EQE.”
Q.16 is meaning ul. *
Q.16 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
22 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
I s aking he second p ecu so as co- eac an , bu he o e all da a is help ul
Q.18 C oss- able: Tables 3 and 5. Run he ollowing que y h ps:// inyu l.com/ 3 5-
co ela ion
Na u al-language ques ion being e alua ed:
“
Which a e-ea h oxide ma ices sha e syn hesis (Table 3) and de ice
pe o mance (Table 5), and how do syn hesis/annealing condi ions ela e
o e�ciencies and li e imes?”
Q.17 is meaning ul. *
Q.17 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
23 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.19 C oss- able: Tables 2, 3, and 5. Run he ollowing que y h ps:// inyu l.com/ 2 3 5-
complex
Na u al-language ques ion being e alua ed:
“F om Table 2, selec E -doped luminescen oxides. Combine syn hesis empe a u es (Table 3) and
EQEs (Table 5) and compu e:
e�ciency index = EQE / syn hesis empe a u e × 100.
Rank ma e ials by his index.”
Q.18 is meaning ul. *
Q.18 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
24 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
ALE Pape 1 — A omic Laye E ching a he Tipping Poin : An O e iew
DOI:
h ps://doi.o g/10.1149/2.0061506jss
Q.19 is meaning ul. *
Q.19 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
25 o 45 11/26/2025, 8:49 AM
Q.6 Run he ollowing que y h ps:// inyu l.com/ 3-complex- ang
Na u al-language ques ion being e alua ed:
“
G oup all he mal ALE p ocesses by mechanism a che ype and compu e dis inc ma e ials and mean
EPC pe g oup.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
ALE Pape 4 — Physical and chemical e ec s in di ec ional a omic laye e ching
DOI:
h ps://doi.o g/10.1088/1361-6463/ab6d94
Q.6 is meaning ul. *
Q.6 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
32 o 45 11/26/2025, 8:49 AM

Table 1 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 1:
h ps://o kg.o g/compa isons/R1560825

The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 1.
Q.7 Run he ollowing que y h ps:// inyu l.com/ 1-semi-ale
Na u al-language ques ion being e alua ed:
“
Lis all semiconduc o ALE p ocesses and e u n modi�ca ion, emo al, and ac i a ion ypes; so by
ac i a ion mode.”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.7 is meaning ul. *
Q.7 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
33 o 45 11/26/2025, 8:49 AM
good able could be made be e by including e ch a es i a ailable
Q.8 Run he ollowing que y h ps:// inyu l.com/ 1-sang-complex
Na u al-language ques ion being e alua ed:
“
G oup semiconduc o ALE p ocesses by ac i a ion ype and coun ma e ials pe modi�ca ion– emo al
pai .”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
Q.8 is meaning ul. *
Q.8 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
34 o 45 11/26/2025, 8:49 AM
ALE Pape 5 — Aniso opic/Iso opic A omic Laye E ching o Me als
DOI:
h ps://doi.o g/10.5757/ASCT.2020.29.3.041
Table 2 — Machine-ac ionable compa ison
Please open he machine-ac ionable e sion o Table 2:
h ps://o kg.o g/compa isons/R1563131
The ollowing wo que ies we e implemen ed on his machine-ac ionable e sion o Table 2.
Q.9 Run he ollowing que y h ps:// inyu l.com/ 2-me als-high-epc
Na u al-language ques ion being e alua ed:
“
Lis all me al ALE p ocesses wi h EPC ≥ 2 Å/cycle; e u n ma e ial,
di ec ion, modi�ca ion/ emo al chemis y, EPC, p ocess empe a u e, and
cycle ime; so by EPC.”
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
35 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.10 Run he ollowing que y h ps:// inyu l.com/ 2-me als-complex
Na u al-language ques ion being e alua ed:
“G oup me al ALE p ocesses by di ec ion and compu e numbe o me als and mean EPC pe g oup;
so by mean EPC.”
Q.9 is meaning ul. *
Q.9 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
36 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
ALE Pape 6 — A omic Laye E ching o SiO₂ o Nanoscale Semiconduc o De ices: A
Re iew
DOI:
h ps://doi.o g/10.5757/ASCT.2024.33.1.1
Q.10 is meaning ul. *
Q.10 esul p o ides a use ul syn hesis o he insigh s in he Table.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
37 o 45 11/26/2025, 8:49 AM

Tables I and II — Machine-ac ionable compa isons
Please open he machine-ac ionable e sion o Table I:
h ps://o kg.o g/compa isons/R1560949
Please open he machine-ac ionable e sion o Table II:
h ps://o kg.o g/compa isons/R1560977
The ollowing que ywe e implemen ed on his machine-ac ionable e sions o he ables.
Q.11 C oss- able: Tables I and II. Run he ollowing que y h ps:// inyu l.com/pap6-c ossq1-
easy
Na u al-language ques ion being e alua ed:
Fo each �uo oca bon p ecu so sys em appea ing in bo h ables, lis
p ecu so chemis ies, emo al gas, p ocess empe a u e, e ching a e,
and ion-ene gy window (RT ±20 °C), so ed by e ching a e
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.11 is meaning ul. *
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
38 o 45 11/26/2025, 8:49 AM
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Tables III and IV — Machine-ac ionable compa isons
Please open he machine-ac ionable e sion o Table III:
h ps://o kg.o g/compa isons/R1561025
Please open he machine-ac ionable e sion o Table IV:
h ps://o kg.o g/compa isons/R1561023

The ollowing que ywe e implemen ed on his machine-ac ionable e sions o he ables.
Q.11 esul p o ides a use ul syn hesis o he insigh s in he Tables.
I he amoun o da a in o iginal able eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he ables.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
39 o 45 11/26/2025, 8:49 AM
Q.12 C oss- able: Tables III and IV. Run he ollowing que y h ps:// inyu l.com/pap6-c ossq2-
easy
Na u al-language ques ion being e alua ed:
“
Collec all aniso opic SiO₂ ALE p ocesses based on C₄F₈/A plasma
ac oss bo h ables; lis a ge selec i i y pai , selec i i y ange,
chambe -wall ea men , and e ch a e; so by e ch a e.
”
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Could be ela ed o he pape s bu he able doesn' ha e much use ul da a - he e is a lo o o e lap/
epea alues
Q.12 is meaning ul. *
Q.12 esul p o ides a use ul syn hesis o he insigh s in he Tables.
I he amoun o da a in o iginal ables eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
I you use ulness a ing was below 3, please b ie ly s a e he eason (one sen ence o
ph ase)
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
40 o 45 11/26/2025, 8:49 AM
Tables I, II, and III — Machine-ac ionable compa isons
The ollowing que ywas implemen ed on his machine-ac ionable e sions o he ables. They a e
linked abo e.
Q.13 C oss- able: Tables I, II, and III. Run he ollowing que y h ps:// inyu l.com/pap6-
c ossq1-complex
Na u al-language ques ion being e alua ed:
G oup aniso opic SiO₂ ALE p ocesses by �uo oca bon p ecu so amily
(e.g. C₄F₈, CHF₃, C₃F₇OCH₃ isome s) and compu e mean/max e ching a e,
union o ion-ene gy windows, and max selec i i y.
S ongly disag ee
1 2 3 4 5
S ongly ag ee
S ongly disag ee
1 2 3 4 5
S ongly ag ee
Q.13 is meaning ul. *
Q.13 esul p o ides a use ul syn hesis o he insigh s in he Tables.
I he amoun o da a in o iginal ables eels small, imagine he same que y ope a ing o e a
much la ge , con inuously upda ed e sion o he able.
*
ALD/E Machine-ac ionable Table Que y Resul s Valida ion h ps://docs.google.com/ o ms/u/4/d/1RRxu-wqUK8V-CA1bed_ eK1...
41 o 45 11/26/2025, 8:49 AM