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Compact device for CO2 optical sensing using macroporous silicon photonic crystals

Vega Bru, Didac,Rodríguez Martínez, Ángel,Todorov Trifonov, Trifon,Calavia, Raul,Vilanova, Xavier

Abstract

A photonic crystal based on a macroporous silicon structure has been fabricated and successfully used for the detection of carbon dioxide. In this paper, the device and the measurement results are presented. The sensing device here described uses an optical approach to the detection of the gas. The use of a photonic crystal allows creating a compact device working in the medium infrared spectral range. A 700 nm square lattice macroporous structure was fabricated by electrochemical etching, creating a photonic gap centered at the 4.2 µm, a CO2 absorption line. The obtained results rely only on the absorption spectra measurement.

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1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 2 3 CDE’2015 10 Spanish Conference On Electron Devices Aranjuez, Spain February 11‐13, 2015 www.cde2015.es Palacio del Nuncio COMMITTEES LOCAL ORGANIZING COMMITTEE from Universidad Rey Juan Carlos (URJC) Angel Luis Álvarez Castillo (Conference Chair) (Dept. Teoría de la Señal y Comunicaciones, Sistemas Telemáticos y Computación – URJC) Mª del Carmen Coya Párraga(Conference Co-Chair) (Dept. Teoría de la Señal y Comunicaciones, Sistemas Telemáticos y Computación – URJC) HONOR COMMITTEE D. Fernando Suárez Bilbao, Excmo. y Magfco. Rector de la Universidad Rey Juan Carlos Dª María José Martínez de la Fuente, Excma. Alcaldesa de Aranjuez D. Juan José Nájera Sánchez, Ilmo. Vicerrector de Extensión Universitaria D. Francisco Javier Ramos López, Director de la ETSI Telecomunicación – URJC ADVISORY COMMITTEE (Name – Institution) Juan A. de Agapito - Universidad Complutense de Madrid XAVIER Aymerich - Universidad Autónoma de Barcelona Luis Bailón - Universidad de Valladolid Fernando Briones - IMM-CNM-CSIC Enrique Calleja - Universidad Politécnica de Madrid / ISOM Pedro Cartujo - Universidad de Granada Luis Castañer - Universidad Politécnica de Cataluña Xavier Correig - Universidad Rovira i Virgili Eugenio García Moreno - Universidad de las Islas Baleares Germán González-Díaz – Universidad Complutense Javier Gracia - CEIT F. Javier Gutiérrez Monreal - ISI-CSIC Antonio Luque - Universidad Politécnica de Madrid / IES Joan Ramón Morante - Universidad de Barcelona / IREC Elías Muñoz Merino - Universidad Politécnica de Madrid / ISOM José Millán - IMB-CNM-CSIC Juan Piqueras - Universidad Aut6noma de Madrid José Ramos Barrado – Universidad de Málaga Francisco Serra - Universidad Autónoma de Barcelona / CNM-CSIC th 4 5 TECHNICAL COMMITTEE (Name – Institution) Ramón Alcubilla – (CDE General Chair) Universidad Politécnica de Catalunya Carlos Algora - Universidad Politécnica de Madrid / IES Javier Berganzo - Ikerlan Carles Cane - IMB-CNM-CSIC Fernando Calle - Universidad Politécnica de Madrid / ISOM Enrique Castaño - CEIT Salvador Dueñas Carazo - Universidad de Valladolid Helena Castán Lanaspa – Universidad de Valladolid Ignacio Garcés - Universidad de Zaragoza Antonio García Loureiro - Universidad de Santiago de Compostela Tomas González - Universidad de Salamanca María Jesús Hernández - Universidad Autónoma de Madrid Carmen Horrillo - ISI-CSIC Pedro Ibañez Ereño - Tecnalia Fernando López - Universidad Carlos III Juan A. López Villanueva - Universidad de Granada Lluis Marsal - Universidad Rovira i Virgili Ignacio Martil de la Plaza - Universidad Complutense de Madrid Enrique Maset - Universidad de Valencia Montserrat Nafría - Universidad Autónoma de Barcelona Isabel Obieta Villalonga - Inasmet Rodrigo Picos - Universidad de las Islas Baleares José Manuel Quero Reboul - Universidad de Sevilla / AICIA José María Ripalda Cobián - IMM-CNM-CSIC Albert Romano Rodríguez - Universidad de Barcelona TECHNICAL CO‐SPONSORSHIP: SUPPORTED BY: Ayuntamiento de Aranjuez 158 159 &RPSDFW'HYLFHIRU&22SWLFDO6HQVLQJXVLQJ 0DFURSRURXV6LOLFRQ3KRWRQLF&U\VWDOV   'LGDF9HJD7ULIRQ7ULIRQRY5DO&DODYLD;DYLHU9LODQRYDÈQJHO5RGUtJXH]  'HSDUWDPHQWG¶(QJLQ\HULD(OHFWUzQLFD8QLYHUVLWDW3ROLWqFQLFDGH&DWDOXQ\D83&%DUFHORQD6SDLQ &HQWUHGH5HFHUFDHQ1DQRHQJLQ\HULD8QLYHUVLWDW3ROLWqFQLFDGH&DWDOXQ\D83&%DUFHORQD6SDLQ 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